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外文資料翻譯
Crankshaft three degrees of freedom use the same parallel micro-mechanical structure of the experimental design
利用曲臂3個自由度的相同并列式微型機(jī)械結(jié)構(gòu)的實(shí)驗(yàn)設(shè)計(jì)
Abstract: Crankshaft in mechanical structure design of the small general has been replaced mechanical connection and extensive use. However, the wrong model will be reduced Crankshaft precision mechanical structure. In this paper, in order to get the correct model Crankshaft and design of a 3-DOF planar the same type of micro-mechanical structure. To that end, an initial analysis of kinematics including inverse kinematics, internal kinematics and coordination of the work of a fixed model has been raised. First of all, take into account a freedom Crankshaft cycle type, but FEM based on the simulation results is inconsistent with the analysis of the results. This is because small axial direction along the connecting rod extended to hinder the accuracy of the mechanical connection. To address this problem, including an additional sports bodies such as the prism connecting the two degree of freedom model Crankshaft has already begun to use some. According to this model, ensure the accuracy of the mechanical structure. Through simulation and test showed that the accuracy of this model is effective. This work emphasized the model Crankshaft Crankshaft guarantee the accuracy of the micro-mechanical structure tied to the use of great significance.
摘要：曲臂在機(jī)械的微小結(jié)構(gòu)設(shè)計(jì)中已經(jīng)代替普通機(jī)械連接而廣泛地使用。然而，錯誤的曲臂模型會降低機(jī)械結(jié)構(gòu)的精密度。在這篇論文中，為了得到正確的曲臂模型而設(shè)計(jì)了一種平面 3個自由度相同型式的微型機(jī)械結(jié)構(gòu)。為此，一種初步的運(yùn)動學(xué)分析包括逆運(yùn)動學(xué)，內(nèi)部運(yùn)動學(xué)以及有關(guān)工作協(xié)調(diào)的分析固定模型已經(jīng)被提出來了。首先，考慮到了1個自由度曲臂的循環(huán)類型，但是基于FEM的模擬結(jié)果卻與分析的結(jié)果不一致。這是因?yàn)樾≥S沿著連桿方向延伸從而阻礙了機(jī)械的準(zhǔn)確連接。為了解決這個問題，一種包括這種額外的運(yùn)動機(jī)構(gòu)作為三棱鏡連接的2個自由度的曲臂模型已經(jīng)開始部分地使用了。根據(jù)這種模型，確保了機(jī)械結(jié)構(gòu)的精確性。通過模擬和試驗(yàn)顯示了這種準(zhǔn)確模型的有效性。這項(xiàng)工作強(qiáng)調(diào)了曲臂模型的準(zhǔn)確性對保證曲臂在并列微型機(jī)械結(jié)構(gòu)中的使用具有重要意義。
Ⅰ、Introduction
Ⅰ、介紹
Micro-mechanical devices in many areas is a key and essential techniques, such as scanning electron microscopy, X-ray lithography, mask alignment and micro-machinery. Recently, a lot of Crankshaft on the use of micro-mechanical structure of the analysis and experimental research. The majority of previous studies (Moriyama [1], [2], such as Taniguchi, Tomita, etc. [3], [4], such as Ryu, Chang, etc. [5], [6] Peng, etc., etc. [10] - [13] ) is the freedom to use an arm for recycling Crankshaft, three degrees of freedom for Crankshaft spherical arm, and thus the production model. However, sometimes even a small total, will do Crankshaft linear motion. Some researchers believe that there is a Crankshaft additional degree of freedom. However, they ignored the model in the process of easy mobility, but also not to micro-mechanical structure in the correct use of the fixed model. This led to the failure of the implementation of micro-systems. Therefore, the focus of this work will be easy mobility is based on the analysis of the accuracy of model Crankshaft.
微型機(jī)械裝置在許多領(lǐng)域是一項(xiàng)關(guān)鍵且必不可少的技術(shù)，例如電子顯微掃描，X射線石版印刷術(shù)，mask alignment和微型機(jī)械。最近，出現(xiàn)了很多有關(guān)利用曲臂的微型機(jī)械結(jié)構(gòu)的分析和實(shí)驗(yàn)研究。以前的大多數(shù)研究（Moriyama等[1],Taniguchi等[2],Tomita等[3],Ryu等[4],Chang等[5],Peng等[6]，等等[10]-[13]）是使用1個自由度的曲臂作循環(huán)臂，3個自由度的曲臂作球形臂，并以此制作模型。然而，有時就算總量很小，曲臂也會做直線運(yùn)動。一些研究者認(rèn)為曲臂有一種額外的自由度。但是，他們忽略了模型程序中的易動性分析，而且也沒有提出在微型機(jī)械結(jié)構(gòu)中使用正確的固定模型。這就導(dǎo)致了微系統(tǒng)執(zhí)行的失敗。因此，這項(xiàng)工作的焦點(diǎn)將會是基于易動性分析的曲臂模型的準(zhǔn)確性。
Introduction of the campaign because of the number of independent variables were constrained, and these independent variables, in order to find the relevant links between objects must be clearly defined. Above formula can be adopted (1) to describe the type of M, N, L, respectively Fi j and that movement, freedom of space operations, the number of links, as well as linking of the number of mobile connections i freedom. Exercise also shows that the minimum functioning of the system. When M N bigger than the sport become redundant system.
運(yùn)動性因獨(dú)立變量的數(shù)目而被限制，而這些獨(dú)立的變量為了尋找物體之間的相關(guān)聯(lián)系必須明確說明。以上可以通過公式（1）來進(jìn)行描述，式中M、N、L、j和Fi分別表示運(yùn)動性，操作空間自由度，連桿數(shù)目，連接物數(shù)目以及第i個連接物移動的自由度。運(yùn)動性也表明了系統(tǒng)運(yùn)轉(zhuǎn)的最小值。當(dāng)M比N大時，就成為冗余運(yùn)動系統(tǒng)。
Figure 1 shows a Crankshaft have freedom of the three micro-mechanical structure. Usually, these systems can be Crankshaft rotary connector of the model. Outlined in Figure 2 of the model Crankshaft. If all Crankshaft have a degree of freedom, then the movement of the system are three degrees of freedom. However, in the past, based on such assumptions are the result of the failure of this model because of the inaccuracy of Crankshaft. On the other hand, if all are Crankshaft model of the rotary connector and prism of connections, then the campaign structure reached 12 degrees of freedom. Even if the limit of program analysis and theoretical analysis will enable the two degree of freedom model Crankshaft than one degree of freedom model Crankshaft more accurate results, but need 12 to control the operation of three degrees of freedom rather expensive. Therefore, not only the design of Crankshaft to campaign structure to a minimum, but also to ensure that the structure of precision machinery and sufficient working space.
圖1顯示了一個擁有曲臂的3個自由度的微型機(jī)械結(jié)構(gòu)。通常，在這些系統(tǒng)中曲臂可以作旋轉(zhuǎn)連接物的模型。在圖2中描畫了曲臂的模型。如果所有的曲臂都有1個自由度，那么系統(tǒng)的運(yùn)動性就有3個自由度。然而，以前一些基于這種假設(shè)的結(jié)果都是失敗的，這是因?yàn)榍勰Ｐ偷牟粶?zhǔn)確性。另一方面，如果所有的曲臂模型都有旋轉(zhuǎn)連接物和三棱鏡連接物，那么系統(tǒng)的運(yùn)動結(jié)構(gòu)就達(dá)到12個自由度。即使限定結(jié)構(gòu)程序分析和理論分析能夠使2個自由度的曲臂模型比1個自由度的曲臂模型有更準(zhǔn)確的結(jié)果，但需12個運(yùn)轉(zhuǎn)結(jié)構(gòu)來控制3個自由度比較昂貴。因此，曲臂的設(shè)計(jì)不僅要將運(yùn)動結(jié)構(gòu)減至最少，而且還要確保機(jī)械結(jié)構(gòu)的精密度及充分的工作空間。
In this paper, we designed two types of Crankshaft. The first type used only a relative degree of freedom to produce thicker neck parts, as shown in Figure 2, this shows that the thickness of the hinge. The second type is used to produce two-DOF relatively thin neck parts. Therefore, the second Crankshaft is a freedom with the rotary connector and a freedom connected to the prism production model. If the system of each chain are two degrees of freedom by a hinge and a two degree of freedom of the hinge, then the campaign structure is 6. Therefore, this Crankshaft through six operating structure to operate.
在這篇論文中，我們設(shè)計(jì)了兩種類型的曲臂。第一種類型只用了1個自由度來制作相對較厚的頸下部分，如圖2所示，這部分顯示了鉸鏈的厚度。第二種類型是用了2個自由度來制作相對較薄的頸下部分。因此，第二種曲臂是以擁有1個自由度的旋轉(zhuǎn)連接和1個自由度的三棱鏡連接來制作模型的。如果系統(tǒng)的每一個鏈條都是由一個2個自由度的鉸鏈和兩個1個自由度的鉸鏈組成，那么系統(tǒng)的運(yùn)動結(jié)構(gòu)就是6。所以說，這種曲臂可以通過6個運(yùn)轉(zhuǎn)結(jié)構(gòu)來操作。
Papers content in the next there will be further development. The second part describes the structure of the system. Kinematic analysis and three campaigns campaign structure and six fixed structural system analysis model respectively in the third and fourth part of a demonstration. Part V describes the two comparative freedom and freedom of a Crankshaft precision simulation results, but also embodies the six recommended by the movement of the system's benefits. Correct the effectiveness of this model can be reflected through experiments.
論文中接下來的內(nèi)容將有進(jìn)一步的發(fā)展。第二部分描述了系統(tǒng)的構(gòu)造。運(yùn)動學(xué)分析和3個運(yùn)動結(jié)構(gòu)及6個運(yùn)動結(jié)構(gòu)系統(tǒng)的分析固定模型分別在第三和第四部分進(jìn)行演示。第五部分描述了比較2個自由度和1個自由度的曲臂精密性模擬結(jié)果，同時也體現(xiàn)了所推薦的6個運(yùn)動結(jié)構(gòu)系統(tǒng)的優(yōu)點(diǎn)。這種正確模型的有效性通過實(shí)驗(yàn)可以體現(xiàn)。
Ⅱ、the system structure
Ⅱ、系統(tǒng)構(gòu)造
The text of the proposed three-DOF tied in the same mechanical structure is a working platform and composed of three chains, each chain has three Crankshaft, as shown in Figure 1. This mechanical link in the use of all the Crankshaft, and all are connected through the pressure of the movement and operation factors. February 2 chain of three intervals between 120 °. This symmetrical structure reduced due to temperature differences and the impact of temperature imbalance. Each chain connecting the first and the third are at the bottom with the machines connected to a pressure campaign structure to operate the contrary. All the movement to promote structural connections of each round good sliding surface and rotation.
文中所建議的3個自由度的相同并列機(jī)械結(jié)構(gòu)是由一個工作平臺和三個鏈條所組成的，每個鏈條有三個曲臂，如圖1所示。這種機(jī)械在所有連接處使用了曲臂，而且所有的連接物都是通過壓力運(yùn)動因素而運(yùn)轉(zhuǎn)。三個鏈條之間兩兩間隔120°。這種對稱結(jié)構(gòu)減少了因溫度差異和溫度失調(diào)帶來的影響。每個鏈條第一和第三個連接處都是通過與機(jī)器底部相連的一對壓力運(yùn)動結(jié)構(gòu)而相反地進(jìn)行運(yùn)轉(zhuǎn)。所有的運(yùn)動結(jié)構(gòu)推動每個連接物的圓形表面進(jìn)行良好的滑動和旋轉(zhuǎn)。
In the example in Figure 2 a type Crankshaft. This rotational movement Crankshaft equivalent to the displacement of I2 and h (θ) and. In the X direction of the linear motion distance of A (θ).
在圖2中示例了一種曲臂類型。這種曲臂旋轉(zhuǎn)運(yùn)動的位移等于I2和h(θ) 之和.在X方向上的直線運(yùn)動的距離為A(θ)。
Ⅲ, three campaign kinematic structure of the system
Ⅲ、3個運(yùn)動結(jié)構(gòu)的系統(tǒng)運(yùn)動學(xué)分析
In order to demonstrate a degree of freedom model of the movement of Crankshaft, we will be presented in Figure 3 of this three movement kinematics model of the system. All the previous model Crankshaft only one degree of freedom, and this system has three campaign structure. Passed the map can clearly understand this kinematic analysis.
為了演示1個自由度曲臂模型的運(yùn)動狀況，我們將在圖3中介紹這種3個運(yùn)動結(jié)構(gòu)的系統(tǒng)運(yùn)動學(xué)模型。以前所有的曲臂模型只有1個自由度，而這種系統(tǒng)擁有3個運(yùn)動結(jié)構(gòu)。通過下圖可以清楚地了解這種運(yùn)動學(xué)分析。
A first kinematics
A、第一運(yùn)動學(xué)
First kinematics connected to the output rate vector and vector rate independent of the connection. Below, [G] said Jacobian, the lower left-hand corner of G machinery that tied the hands of the chain of consecutive numbers. G top right hand corner and lower right corner of the symbols that were related or independent parameters. [Gu φ] (θ, j) and [Gu φ] (i, θ) were expressed that a cylindrical j and i Pai [Gu φ]. [Gu φ] (i, j) [Gu φ] (i, j) element. Θ i, j expressed that the first i-chain chain j consecutive rate perspective. The rate for each chain relations through the formula (4) to describe the formula (4) in the output rate vector and i consecutive rate vector angle chain were defined as u and i φ. Three in a row because of the chain have the same rate in the platform, there will be a formula (5) and the formula (6). If the three foundations of a connecting link of an independent, as far as this case, the selection of three each in the chain of Jacobian contrary to the first row constitutes a separate connections to the output vector and the velocity vector of relations, and this rate relations constitute a body, the text following formula (7) indicated, φ a = [θ11θ21θ31] T [iG φ u] = [iGuφ] -1.
第一運(yùn)動學(xué)連接了輸出速率向量和獨(dú)立連接物速率向量。在下文中，[G]表示Jacobian，左下角的G表示并列機(jī)械手中連續(xù)的鏈條數(shù)目。G右上角和右下角的符號分別表示相關(guān)或獨(dú)立的參數(shù)。[Guφ]（θ，j）和[Guφ]（i，θ）分別表示第j個圓柱和第i排的[Guφ]。[Guφ]（i,j）表示[Guφ]的第（i,j）個要素。θi,j表示第i個鏈條的第j個連續(xù)鏈條的角度速率。每個連續(xù)鏈條的速率關(guān)系通過公式（4）來描述，公式（4）中輸出速率向量和第i個連續(xù)鏈條的角度速率向量分別定義為u 和iφ。因?yàn)槿龡l連續(xù)鏈條在平臺中擁有相同速率，就有了公式（5）和公式（6）。如果把三個基礎(chǔ)連接物作為獨(dú)立連接物，照這個情形來說，挑選三個鏈條中每個相反的Jacobian中的第一排構(gòu)成了輸出向量和獨(dú)立連接物向量的速率關(guān)系，而這種速率關(guān)系又構(gòu)成了一個本體，如下文公式（7）所示，其中φa=[θ11θ21θ31]T，[iGφu]=[iGuφ]-1。
Now, reverse the formula (7) in the relationship between the output of the first order for the kinematics of the system linked by formula (8) can understand that these [Gua] = [Gau] -1.
現(xiàn)在，顛倒一下公式（7）中的生產(chǎn)量關(guān)系， 第一順序促進(jìn)了系統(tǒng)的運(yùn)動學(xué)聯(lián)系，通過公式（8）可以了解，其中[Gua]=[Gau]-1。
B, a fixed model
B、固定模型
Assumptions used in Figure 1 Crankshaft only in the Z axis, a rotary movement, while neglecting the other direction on the transfer. Crankshaft can connect all being used as a spring, in the strength of the needs or the needs of start or bending moment (or compressed). Therefore, in order to calculate input to the operation of machinery, we must use the same output as a reference to obtain the analysis of the fixed model.
假設(shè)圖1中使用的曲臂只在Z軸上有旋轉(zhuǎn)移動，而忽視了其他方向上的轉(zhuǎn)移。曲臂可以在所有的連接處被當(dāng)作彈簧使用，在需要的力量下或需要的時刻彎曲或者展開（或壓縮）。因此，為了計(jì)算輸入量以便操作機(jī)器，我們必須利用同等的輸出量作為參考來獲得分析的固定模型。
Be fixed ontology of the i-chain can be written (9), including iKj said that the first paragraph i j-linked connections of fixed structure. In a state of equilibrium, the machinery of the potential energy storage can be used (10), which [iG φ u] said that contrary Jacobian φ and u make a fine replacement, can inversus [iG φ u] access. [Kuu] that fixed by the bulk of the operational space. Formula (10), we can see that the output can be fixed Ontology (11) said. According to the formula (11), an effective vector output attributed to the transfer of δ u, is defined as (12), which we should pay attention to is that when the system is symmetrical structure and the same location of the three chains have the same fixed link of the , [Kuu] is a diagonal. Ⅳ with six movable structure kinematic analysis system。
分析固定本體得到第i個鏈條可以寫成（9），其中，iKj表示第i個鏈上第j個連接物的固定結(jié)構(gòu)。在平衡狀態(tài)下，機(jī)械中貯藏的潛在能量可以用（10）來表示，其中[iGφu]表示相反的Jacobian使得φ和u 發(fā)生細(xì)微置換，可以通過逆位[iGφu]獲得。[Kuu]表示固定本體所劃分的可操作空間。公式（10）中可以看出，輸出的固定本體可以用（11）來表示。根據(jù)公式（11），一個有效的輸出量向量歸因于δu的轉(zhuǎn)移，被定義為（12），其中要注意的是當(dāng)系統(tǒng)處于對稱結(jié)構(gòu)而且三個鏈條相同位置的連接物擁有相同固定性的時候，[Kuu]是一條對角線。
Ⅳ with six movable structure kinematic analysis system
Ⅳ、擁有6個可動結(jié)構(gòu)系統(tǒng)的運(yùn)動學(xué)分析
When each of the link was considered Crankshaft Figure 3 (b) shown with two degrees of freedom, the movable structure is six. Records of each chain according to the first axis direction Crankshaft has extended an additional three-vector form of connectivity. Will be described below in the kinematic analysis of this situation
當(dāng)每個連接處的曲臂被認(rèn)為如圖3（b）所示擁有2個自由度的話，系統(tǒng)的可動結(jié)構(gòu)是6個。記錄每個鏈條的第一個曲臂根據(jù)軸方向延伸擁有一個額外的三棱形連接體。在下文中將敘述這個情況的運(yùn)動學(xué)分析。
A first kinematics
A、第一運(yùn)動學(xué)
Each of the chain, the center position (x, y) and the operating platform of the position were expressed as φ (13), (14), (15). Figure 3 of the length of the actual connectivity for Li1 said, the i-hi2 said that the chain of three-vector form of the transfer link, that link Iij of fixed length. Distinguish between the chain on each row between the first time kinematic output equation can be used (16) said. Because of three consecutive platform in the center of the chain have the same rate of the output vector, we have the formula (17), (18). Here, we think that every first and third chain of connections is independent of the connection. Therefore, a total of six separate connections. If rearranging (17), (18), then independent of the connection (φ a) and the associated connectivity of (φ p) by the relationship between the (19) was. To (19) Insert (16) in (20). Finally, the output of separate connections and the relationship between the rate adopted (21) available.
對每個鏈條來說，中心位置（x,y）和操作平臺上的φ方位分別表示為（13）、（14）、（15）。圖3中實(shí)際連接物的長度表示為Li1，其中hi2表示第i個鏈條上三棱形連接物的轉(zhuǎn)移，Iij表示連接物的固定長度。區(qū)分上述關(guān)于每個連續(xù)鏈條的第一運(yùn)動學(xué)關(guān)系的時間生產(chǎn)量等式可以用（16）來表示。因?yàn)檫@三個連續(xù)的鏈條在平臺中心擁有相同的輸出速率向量，所以我們有公式（17）、（18）。這里，我們認(rèn)為每個鏈條第一和第三個連接物是獨(dú)立連接物。因此，一共有6個獨(dú)立連接物。若重新排列（17）、（18），那么獨(dú)立連接物（φa）和相關(guān)連接物（φp ）之間的關(guān)系可通過（19）獲得。把（19）插入（16）可得（20）。最后，輸出和獨(dú)立連接物速率之間的關(guān)系通過（21）可得。
B, on the contrary kinematics
B、相反運(yùn)動學(xué)
The platform is a central location (x, y) position and a point of φ, all tied location of the chain links are available. But because small and mobile (21) equal relations from (22) available. In the six movable structure system, φ a u scope than the large scale. Therefore, (22) to the contrary relations from (23) available, which add to the [Gua] pseudo-opposite decomposition [Gua] + said. This shows that the potential energy system will be kept to the minimum extent is the best split (22) for the conditions. [K φ aa] that an effective fixed ontology and six independent of the connection, see (24), which said that [Kpp] ontology and related fixed line connecting devices.
給出平臺的一個中心位置（x,y）和一個方位角度φ，所有并列鏈條的連接物位置都可以獲得。因?yàn)榧?xì)微移動但與（21）相等的關(guān)系由（22）可得。在6個可動結(jié)構(gòu)系統(tǒng)中，φa的尺度范圍比u大。因此，（22）的相反關(guān)系由（23）可得，其中[Gua]加重的偽相反分解用[Gua]+表示。這表明將系統(tǒng)潛在能量減至最低程度的最佳分裂是以（22）為條件的。[Kφaa]表示一個有效的固定本體與6個獨(dú)立連接物有關(guān)，參看（24），其中[Kpp]表示固定本體與相關(guān)連接裝置相一致。
Finally, the independent connectivity products and the transfer of related links from (25), (26) was.
最后，獨(dú)立連接物和相關(guān)連接物的轉(zhuǎn)移由（25）、（26）獲得。
C, a fixed model
C、固定模型
And connecting independent subsidiary of the fixed link of the respective body languages (27), (28), which iKj expressed that the first i-j chain of fixed connections.
獨(dú)立連接物和附屬連接物的固定本體分別寫成（27）、（28），其中iKj表示第i個鏈條的第j個連接物的固定性
Ontology compliance with the output (24) equal to the fixed body, expressed as (29), which [Caa] = [K φ aa] -1.
輸出遵守本體與（24）所給的固定本體相等，表示為（29），其中[Caa]=[Kφaa]-1。
Therefore, the effective output vector attributable to the δ u, defined as (30), [] = [Kuu Cuu] -1.
因此，有效的輸出量向量歸因于δu，定義為（30），其中[Kuu]=[Cuu]-1。
Ⅴ.Simulation Test
Ⅴ.模擬試驗(yàn)
FEM analysis can be used to prove the feasibility of a fixed model. Given the inherent minimal transfer platform for the operation of power systems transfer vector formula can be adopted (12) or formula (30) calculated. In FEM environment, the force applied to real vector model. Eventually, by comparison, from the initial analysis model is the transfer of FEM model output displacement vector can be tested based on dynamic analysis of the feasibility of a fixed model.
FEM可以用來證明系統(tǒng)分析固定模型的可行性。給出平臺的內(nèi)在極小轉(zhuǎn)移，要求轉(zhuǎn)移系統(tǒng)的操作力量向量可以通過公式（12）或者公式（30）計(jì)算得出。而在FEM環(huán)境中，力量向量適用于實(shí)質(zhì)模型。最終，通過比較，由分析模型給出最初轉(zhuǎn)移的FEM模型的輸出位移向量可以檢驗(yàn)出基于可動性分析的固定模型的可行性。
Working space in the x and y direction is 0 ~ 100 um, in the direction of θ 0 ~ 0.1 °. FEM simulation test results in Figure 4 to can be seen in Figure 6.
系統(tǒng)工作空間在x和y方向上是0~100um，在θ方向上是0~0.1°。FEM模擬試驗(yàn)結(jié)果在圖4至圖6中可以看出。
Variable structure has three micro-mechanical devices in order and all other direction have shown a serious mistake. On the other hand, with six of the variable structure in order micro-mechanical devices showed 5 to 10 per cent of the small mistakes, and in other aspects of performance are only some small mistakes negligible, therefore, have six variable structure System than three variable structure of the system of higher precision.
擁有3個可變結(jié)構(gòu)的微型機(jī)械裝置在命令和其他所有方向都表現(xiàn)出嚴(yán)重的錯誤。另一方面，擁有6個可變結(jié)構(gòu)的微型機(jī)械裝置在命令方面表現(xiàn)出5~10％的微小錯誤，而在其他方面表現(xiàn)的則只是一些微不足道的小錯誤，因此，擁有6個可變結(jié)構(gòu)的系統(tǒng)比3個可變結(jié)構(gòu)的系統(tǒng)有更高的精密性。
Ⅵ. fixed-analysis test
Ⅵ.固定分析試驗(yàn)
Crankshaft from nine developed a mechanical hand can produce a metal Machine. Six contrary piezo-actuator launched and put into use. Piezo-actuato diameter is 17.4 um. Machines in the x and y directions to the extent permitted by the 0 ~ 100 um, in the direction of θ 0 ~ 0.1 °. In this part, we have done a number of simulation experiments to prove the validity of test results. These trials are designed to simulate and forecast through fixed, the machine proved developed operational trends and the development of fixed value. Figure 8 shows the experimental operation. In Figure 9 describes in more detail. Experimental estimates will be operational in fixed below. A cylindrical rod link in the system of six sports centre. A level Hengmu links in the top rod, which is used to measure root Hengmu fixed the rotation. Shoring success is a central part of the operation through a PICOMOTOR, terminal operations through LVDT to measure the displacement of. Engine installed in manipulator links at the bottom of the F / T for measurement in the x and y directions can be fixed on the distribution of accurate information to estimate the strength, and this information can be passed force F / T measurement of the reaction to estimate.
由9個曲臂構(gòu)成的發(fā)達(dá)的機(jī)械手可以制作一臺金屬線切割機(jī)。六組相反發(fā)動的piezo-actuator投入使用。piezo-actuato的直徑是17.4um。機(jī)器在x和y方向上允許的范圍是0~100um，在θ方向上0~0.1°。在這部分中，我們做了一些實(shí)驗(yàn)來證明模擬試驗(yàn)結(jié)果的有效性。這些試驗(yàn)的目的是通過與模擬的預(yù)測固定性比較，證明發(fā)達(dá)機(jī)器可操作固定性的發(fā)展趨勢和價值。圖8顯示了實(shí)驗(yàn)的操作。在圖9中更詳細(xì)描述。估量可操作固定性的實(shí)驗(yàn)會出現(xiàn)在下文中。一個圓柱形的撐桿連結(jié)在6個運(yùn)動結(jié)構(gòu)系統(tǒng)的中心。一根水平橫木連結(jié)在撐桿的頂部，這根橫木是用來測量旋轉(zhuǎn)固定性的。撐竿的中心部分是通過一個PICOMOTOR運(yùn)轉(zhuǎn)的，末端運(yùn)轉(zhuǎn)位移通過LVDT來測量的。發(fā)動機(jī)設(shè)置在連結(jié)機(jī)械手底部的F/T計(jì)測器中，x和y方向上的固定性可通過分配精確的力量信息來估計(jì)，而這種力量信息又可以通過F/T計(jì)測器的反作用來估計(jì)。
Through the promotion of standards and measurement Hengmu freedom for the three rotating mechanical devices and the rotation axis to measure rotation fixed. Figure 10 shows the results. Slope of three degrees of freedom in the mechanical device in each direction on fixed. Observation showed that in the x and y directions are identical to the fixed This proves that the previous [9] reported the results of the analysis. From the test and simulation of workable get stuck in Table 1 lists, which kxx, kyy, k θθ that tilt terminology [kww].
通過推動水平橫木和測量因3個自由度的機(jī)械裝置旋轉(zhuǎn)而產(chǎn)生的旋轉(zhuǎn)軸來測量旋轉(zhuǎn)固定性。圖10顯示了實(shí)驗(yàn)結(jié)果。坡度體現(xiàn)了在3個自由度的機(jī)械裝置中每個方向上的固定性。觀察表明，在x和y方向上的固定性是完全相同的，這證明了先前[9]中所報道的分析結(jié)果。從試驗(yàn)和模擬中獲得的可操作固定性在表1中列出了，其中kxx，kyy，kθθ表示傾斜術(shù)語[kww]。
As shown in Figure 1, simulation and test results between about 30% of the theoretical error rate. It is not perfect, but since the shooting parameters of the micro-system, it is sensitive to the satisfaction of people. The error rate in part because of manufacturing errors, and the other was partly due to measurement errors caused. We believe that these errors can be improved through the design and the actual design of Calibration technology improvements to make up for.
如圖1所示，在模擬和試驗(yàn)結(jié)果之間大約有30％的理論錯誤率。它并不完美，但自從微型系統(tǒng)對射擊參數(shù)敏感時它還是讓人滿意的。這個錯誤率一部分是因?yàn)橹圃焐系腻e誤，另一部分是由于測量上的錯誤造成的。我們相信這些錯誤可以通過設(shè)計(jì)的改善和實(shí)際設(shè)計(jì)中校準(zhǔn)刻度技術(shù)的改進(jìn)來彌補(bǔ)。
Ⅶ. conclusions
Ⅶ.結(jié)論
Crankshaft inaccurate model can not ensur